Surface Modification of Solids by Extreme Ultraviolet and Plasma Treatment

In this paper, results of surface modification, using a laser-produced plasma source of extreme ultraviolet, and the extreme ultraviolet induced low temperature plasmas, are presented. It was shown that irradiation of different materials by intense extreme ultraviolet pulses results in strong changes of the surface morphology. Examples of micro- and nanostructures obtained this way are presented. It was also demonstrated that a dual action of the radiation pulses and low temperature plasmas allows to modify a molecular structure of exposed materials.