Influence of Interfacial Effects on X-ray Diffraction Spectra of the [GaAs]$\text{}_{n}$[AlAs]$\text{}_{m}$ Superlattices

Influence of interdiffusion, terrace growth, and macroscopic uniformity on X-ray diffraction spectra of [GaAs]$\text{}_{n}$[A1As]$\text{}_{m}$ superlattices are presented. High-angle spectra are analysed on the basis of the kinematic theory of diffraction, whereas low-angle spectra are analysed using the dynamic theory. Computer--simulated (using a Monte-Carlo method) spectra based on a "statistical" model of the superlattice structure are applied in the analysis.