Investigation of Morphology and Chemical Composition of Self-Organized Semiconductor Quantum Dots and Wires by X-Ray Scattering

X-ray scattering methods suitable for the investigation of the morphology and chemical composition of self-organized quantum dots and quantum wires are reviewed. Their application is demonstrated in experimental examples showing that a combination of small angle X-ray scattering with high-resolution X-ray diffraction can reveal both the shape and the chemical composition of the self-organized objects.