Growth of NdBa$\text{}_{2}$Cu$\text{}_{3}$O$\text{}_{7-δ}$ Superconducting Thin Films on SrTiO$\text{}_{3}$(100) and LaSrGaO$\text{}_{4}$(100) Substrates

NdBa$\text{}_{2}$Cu$\text{}_{3}$O$\text{}_{7-δ}$ superconducting thin films were grown on SrTiO$\text{}_{3}$(100) and LaSrGaO$\text{}_{4}$(100) substrates by off-axis rf sputtering and pulsed laser deposition. The effects of several deposition parameters, e.g. gas pressure, substrate temperature and energy density were studied. Thin films grown by off-axis rf sputtering were highly c-axis oriented, but those by pulsed laser deposition were predominantly a-axis oriented under our deposition conditions. However, the c-axis oriented portion for the films grown by pulsed laser deposition was increased by increasing the temperature above 800°C. T$\text{}_{c(zero)}$ was 87 K and 83 K for the c- and a-axis oriented films respectively. The critical current density of c-axis oriented films was 10$\text{}^{6}$-10$\text{}^{7}$ A/cm$\text{}^{2}$ below 60 K.