Joining Of Green Body And Dense Substrate For Indium Tin Oxide Under Uniaxial Pressure In An Open Condition

The green body and dense substrate of indium tin oxide was joined by uniaxially pressing at 0.3 MPa at 1300°C to test the restoring of the eroded part of transparent conducting oxide target. The green body was sintered to 98% of theoretical density under the suppression of shrinkage along the boundary below 5%. The boundary between two parts was free of pore but could be recognized from the difference in grain sizes. The joined part had the virtually same density with the substrate, but the grain size was less than one fifth compared with that of substrate.